Information
The powerful and economical batch coating system combines shortest process times, energy savings and great stability for high end processes – ideal for medium-sized and larger Rx labs.
The modular system is available in two versions, with either one or two turbomolecular pumps. Combined with the powerful cryo cooler and extended Meissner trap it facilitates shortest cycle times. Energy consumption is at a minimum, making EBC 900 X both economical and eco-friendly.
The high performance EBG system and crucible configuration provides full evaporation material flexibility – whether on a segmented dome or a flip-over system. To reduce downtime, the crucible has been designed to be interchangable. The coater’s smart encapsulation and shutter technology reduces contamination and the need for shield changes, streamlining maintenance.
For the great variety of coatings possible, the layer properties are optimized with ion assisted deposition using Ar or O2 to guarantee best process quality.
EBC 900 X features next level coating technology, using a new full-view control system for full process control at your fingertips. Any performance unit involved in the process is integrated and controlled via one smart interface.
EBC 900 X
EBC 900 X chamber
Featuring advanced coating technology, e.g. an extended Meissner trap, new shutter technology, and more
Quick change crucible
Facilitating minimal downtime.
High-tech control system
Smart integrated process control controlling any involved performance unit and extended process visualizations
Benefits
- Economical mid-sized vacuum coating system
- Short cycle times, high productivity
- Proven reliable technology
- High-end quality coatings
- Smart fully integrated process control
- Easy maintenance
- Very low energy consumption
- Compact footprint
Technical Data
vacuum
pre-vacuum 280 m³/h
high-vacuum 2200 l /s (N2) or 2 x 2200 l/s (N2) incl. a gate-valve system
ion source
40 – 300 V and up to 6.3 A (850 W), 2 gases (O2 and Ar)
EBG
8 kV / 375 mA / 12 pockets
substrate heater
up to 4000 W
XTAL
6 MHz double head
options
Meissner-trap with cryo-cooler, 3 segment dome, flip-over, 2nd turbomolecular pump, thermal evaporator (boat)
power consumption
20 kVA avg.
weight machine
approx. 1800 kg (3969 lb.)
dimensions (w x d x h)
approx. 1860 x 1600 x 2030 mm (74 x 63 x 80 inches)
capacity 3 segment dome - depending on lens diameter
Ø 65 mm – 114 lenses
Ø 70 mm – 96 lenses
Ø 75 mm – 84 lenses
Ø 80 mm – 72 lenses
capacity flip-over
Ø 65 mm – 72 lenses
Ø 70 mm – 54 lenses
Ø 75 mm – 54 lenses
Ø 80 mm – 36 lenses
All data subject to change without notice. Please verify details with SCHNEIDER.